AFM and TEM study of the lateral composition modulation in etched and photo etched InxGa1-xP epitaxial layers

  1. Eremenko, V.
  2. González, L.
  3. González, Y.
  4. Vdovin, V.
  5. Vazquez, L.
  6. Aragón, G.
  7. Herrera, M.
  8. Briones, F.
Materials Science and Engineering B: Solid-State Materials for Advanced Technology

ISSN: 0921-5107

Datum der Publikation: 2002

Ausgabe: 91-92

Seiten: 269-273

Art: Konferenz-Beitrag

DOI: 10.1016/S0921-5107(01)01016-9 GOOGLE SCHOLAR