AFM and TEM study of the lateral composition modulation in etched and photo etched InxGa1-xP epitaxial layers

  1. Eremenko, V.
  2. González, L.
  3. González, Y.
  4. Vdovin, V.
  5. Vazquez, L.
  6. Aragón, G.
  7. Herrera, M.
  8. Briones, F.
Journal:
Materials Science and Engineering B: Solid-State Materials for Advanced Technology

ISSN: 0921-5107

Year of publication: 2002

Volume: 91-92

Pages: 269-273

Type: Conference paper

DOI: 10.1016/S0921-5107(01)01016-9 GOOGLE SCHOLAR
Data source: Scopus