AFM and TEM study of the lateral composition modulation in etched and photo etched InxGa1-xP epitaxial layers
- Eremenko, V.
- González, L.
- González, Y.
- Vdovin, V.
- Vazquez, L.
- Aragón, G.
- Herrera, M.
- Briones, F.
Journal:
Materials Science and Engineering B: Solid-State Materials for Advanced Technology
ISSN: 0921-5107
Year of publication: 2002
Volume: 91-92
Pages: 269-273
Type: Conference paper